Adsorption-induced failure modes of thin-film resonators

R Kazinczi, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationThin films: stresses and mechanical properties IX
EditorsCS Ozkan, et al.
Place of PublicationWarrendale
PublisherMaterials Research Society
Pages1-6
Number of pages6
ISBN (Print)1-55899-631-1
Publication statusPublished - 2002
EventThin films: stresses and mechanical properties IX symposium, Boston Massachusetts - Warrendale
Duration: 26 Nov 200130 Nov 2001

Publication series

Name
PublisherMaterials Research Society
NameMaterials Research Society Symposium Proceedings
Volume695
ISSN (Print)0272-9172

Conference

ConferenceThin films: stresses and mechanical properties IX symposium, Boston Massachusetts
Period26/11/0130/11/01

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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