@inproceedings{f3559c450a1c406e88181d27de8eac5c,
title = "Adsorption-induced failure modes of thin-film resonators",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "R Kazinczi and JR Mollinger and A Bossche",
year = "2002",
language = "Undefined/Unknown",
isbn = "1-55899-631-1",
publisher = "Materials Research Society",
pages = "1--6",
editor = "CS Ozkan and {et al.}",
booktitle = "Thin films: stresses and mechanical properties IX",
address = "United States",
note = "Thin films: stresses and mechanical properties IX symposium, Boston Massachusetts ; Conference date: 26-11-2001 Through 30-11-2001",
}