Adsorption-induced Resonance Frequency Change in Submicron Structures

H Sadeghian Marnani, JFL Goosen, A Bossche, F van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbate molecules bound to the upper and lower surface on the resonance frequency has been studied. The ratio between the thickness of the adsorbate layer and the thickness of cantilever will result in either a stiffness or a mass dominated behavior. This effect is investigated for various materials such as SAM (self assembled monolayer), Silicon, SU8, and myosim protein. This model gives insight into the decoupling of both opposite effects and can be used for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects. Index Terms-Adsorption, Resonance frequency, Submicron cantilever, Multilayer.
Original languageUndefined/Unknown
Title of host publicationProceedings SAFE 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
EditorsPJ French, K DeMeyer, W Krautschneider, LK Nanver, MCM van de Sanden, J Schmitz
Place of PublicationVeldhoven
PublisherTechnology Foundation STW
Pages621-624
Number of pages4
ISBN (Print)978-90-73461-49-9
Publication statusPublished - 2007
EventSAFE 2007 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors - Veldhoven
Duration: 29 Nov 200730 Nov 2007

Publication series

Name
PublisherTechnology Foundation STW

Conference

ConferenceSAFE 2007 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
Period29/11/0730/11/07

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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