| Original language | Undefined/Unknown |
|---|---|
| Place of Publication | Delft |
| Publisher | Delft University of Technology |
| Number of pages | 6 |
| Publication status | Published - 1998 |
Publication series
| Name | |
|---|---|
| Publisher | TU Delft |
Advanced dry etching for next generation thin film heads for magnetic recording.
EWJM van der Drift, S Radelaar
Research output: Book/Report › Report › Professional