Advanced excimer-laser crystallization process for single-crystalline thin film transistor

R Ishihara, PC van der Wilt, BD van Dijk, A Burtsev, JW Metselaar, CIM Beenakker

Research output: Contribution to journalArticleScientificpeer-review

36 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)77-85
Number of pages9
JournalThin Solid Films
Volume427
Publication statusPublished - 2003

Keywords

  • ZX CWTS JFIS < 1.00

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