Advanced excimer-laser crystallization process for single-crystalline thin film transistor

R Ishihara, PC van der Wilt, BD van Dijk, A Burtsev, JW Metselaar, CIM Beenakker

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{2cc5cd96873c4407b82d42f8ae0ae7e3,

title = "Advanced excimer-laser crystallization process for single-crystalline thin film transistor",

keywords = "ZX CWTS JFIS < 1.00",

author = "R Ishihara and {van der Wilt}, PC and {van Dijk}, BD and A Burtsev and JW Metselaar and CIM Beenakker",

year = "2003",

language = "Undefined/Unknown",

volume = "427",

pages = "77--85",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}