Advanced excimer-laser crystallization techniques of Si thin-film for location control of large grain on glass

R Ishihara, PC van der Wilt, BD van Dijk, A Burtsev, FC Voogt, GJ Bertens, JW Metselaar, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

32 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE Vol. 4295
Editors EF Kelley, T Voutsas
Place of PublicationBellingham
PublisherSPIE
Pages14-23
Number of pages10
ISBN (Print)0-8194-3973-8
Publication statusPublished - 2001
EventFlat Panel Display Technology and Display Metrology II, San Jose - Bellingham
Duration: 22 Jan 200123 Jan 2001

Publication series

Name
PublisherSPIE Press

Conference

ConferenceFlat Panel Display Technology and Display Metrology II, San Jose
Period22/01/0123/01/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

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