Advanced NO2 Gas Sensor Fabrication through UV Laser-Induced Selective Reduction Laser Sintering

Shaogang Wang; Qihang Zong; Huiru Yang; Qianming Huang; Huaiyu Ye; Paddy French

doi:10.1109/NEMS60219.2024.10639835

Advanced NO₂ Gas Sensor Fabrication through UV Laser-Induced Selective Reduction Laser Sintering

Shaogang Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, Paddy French^*

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

This study introduces an innovative approach for fabricating flexible nitrogen dioxide (NO₂) gas sensors based on In2O3 nanoparticles (NPs) using selective reduction laser sintering (SRLS) technology. The SRLS technology enables specific chemical reduction reactions during the sintering process, achieving fabrication and control of oxygen vacancy defects and the porous structure in the In₂O₃ sintering region. The sensor exhibits exceptionally high sensitivity, fast response/recovery times, and superior selectivity for NO₂ gas detection, particularly at room temperature. Compared with traditional NO₂ gas sensor fabrication methods, this technology not only provides a potential way to fabricate highperformance NO₂ gas sensors but also further expands the application potential of laser direct writing (LDW) technology in the fields of advanced materials and sensor fabrication.

Original language	English
Title of host publication	2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	9798350359831
DOIs	https://doi.org/10.1109/NEMS60219.2024.10639835
Publication status	Published - 2024
Event	19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 - Kyoto, Japan Duration: 2 May 2024 → 5 May 2024

Publication series

Name	2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024

Conference

Conference	19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
Country/Territory	Japan
City	Kyoto
Period	2/05/24 → 5/05/24

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Flexible gas sensor
Indium oxide nanoparticles
NO detection
Selective reduction laser sintering

Access to Document

10.1109/NEMS60219.2024.10639835

Advanced_NO2_Gas_Sensor_Fabrication_through_UV_Laser-Induced_Selective_Reduction_Laser_SinteringFinal published version, 1.63 MB

Cite this

Wang, S., Zong, Q., Yang, H., Huang, Q., Ye, H., & French, P. (2024). Advanced NO₂ Gas Sensor Fabrication through UV Laser-Induced Selective Reduction Laser Sintering. In 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 (2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024). IEEE. https://doi.org/10.1109/NEMS60219.2024.10639835

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abstract = "This study introduces an innovative approach for fabricating flexible nitrogen dioxide (NO2) gas sensors based on In2O3 nanoparticles (NPs) using selective reduction laser sintering (SRLS) technology. The SRLS technology enables specific chemical reduction reactions during the sintering process, achieving fabrication and control of oxygen vacancy defects and the porous structure in the In2O3 sintering region. The sensor exhibits exceptionally high sensitivity, fast response/recovery times, and superior selectivity for NO2 gas detection, particularly at room temperature. Compared with traditional NO2 gas sensor fabrication methods, this technology not only provides a potential way to fabricate highperformance NO2 gas sensors but also further expands the application potential of laser direct writing (LDW) technology in the fields of advanced materials and sensor fabrication.",

keywords = "Flexible gas sensor, Indium oxide nanoparticles, NO detection, Selective reduction laser sintering",

author = "Shaogang Wang and Qihang Zong and Huiru Yang and Qianming Huang and Huaiyu Ye and Paddy French",

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Wang, S, Zong, Q, Yang, H, Huang, Q, Ye, H & French, P 2024, Advanced NO₂ Gas Sensor Fabrication through UV Laser-Induced Selective Reduction Laser Sintering. in 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024, IEEE, 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024, Kyoto, Japan, 2/05/24. https://doi.org/10.1109/NEMS60219.2024.10639835

Advanced NO₂ Gas Sensor Fabrication through UV Laser-Induced Selective Reduction Laser Sintering. / Wang, Shaogang; Zong, Qihang; Yang, Huiru et al.
2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024. IEEE, 2024. (2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Ye, Huaiyu

AU - French, Paddy

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2024

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N2 - This study introduces an innovative approach for fabricating flexible nitrogen dioxide (NO2) gas sensors based on In2O3 nanoparticles (NPs) using selective reduction laser sintering (SRLS) technology. The SRLS technology enables specific chemical reduction reactions during the sintering process, achieving fabrication and control of oxygen vacancy defects and the porous structure in the In2O3 sintering region. The sensor exhibits exceptionally high sensitivity, fast response/recovery times, and superior selectivity for NO2 gas detection, particularly at room temperature. Compared with traditional NO2 gas sensor fabrication methods, this technology not only provides a potential way to fabricate highperformance NO2 gas sensors but also further expands the application potential of laser direct writing (LDW) technology in the fields of advanced materials and sensor fabrication.

AB - This study introduces an innovative approach for fabricating flexible nitrogen dioxide (NO2) gas sensors based on In2O3 nanoparticles (NPs) using selective reduction laser sintering (SRLS) technology. The SRLS technology enables specific chemical reduction reactions during the sintering process, achieving fabrication and control of oxygen vacancy defects and the porous structure in the In2O3 sintering region. The sensor exhibits exceptionally high sensitivity, fast response/recovery times, and superior selectivity for NO2 gas detection, particularly at room temperature. Compared with traditional NO2 gas sensor fabrication methods, this technology not only provides a potential way to fabricate highperformance NO2 gas sensors but also further expands the application potential of laser direct writing (LDW) technology in the fields of advanced materials and sensor fabrication.

KW - Flexible gas sensor

KW - Indium oxide nanoparticles

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BT - 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024

PB - IEEE

T2 - 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024

Y2 - 2 May 2024 through 5 May 2024

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Wang S, Zong Q, Yang H, Huang Q, Ye H , French P. Advanced NO₂ Gas Sensor Fabrication through UV Laser-Induced Selective Reduction Laser Sintering. In 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024. IEEE. 2024. (2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024). doi: 10.1109/NEMS60219.2024.10639835