Advanced silicon micromachiningfor 3D micro and nanostructuring

PM Sarro, J Wei

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of thr 1st IWOFM - 3rd IWONN Conference
Editors s.n.
Place of PublicationHalong, Vietnam
PublisherAcademic Press
Pages349-352
Number of pages4
ISBN (Print)987-90-90214597
Publication statusPublished - 2006
Eventthe 1st IWOFM - 3rd IWONN Conference - Halong, Vietnam
Duration: 6 Dec 20069 Dec 2006

Publication series

Name
PublisherAcademic Press VAST

Conference

Conferencethe 1st IWOFM - 3rd IWONN Conference
Period6/12/069/12/06

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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