Advanced silicon micromachiningfor 3D micro and nanostructuring

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of thr 1st IWOFM - 3rd IWONN Conference
Editors	s.n.
Place of Publication	Halong, Vietnam
Publisher	Academic Press
Pages	349-352
Number of pages	4
ISBN (Print)	987-90-90214597
Publication status	Published - 2006
Event	the 1st IWOFM - 3rd IWONN Conference - Halong, Vietnam Duration: 6 Dec 2006 → 9 Dec 2006

Name
Publisher	Academic Press VAST

Conference	the 1st IWOFM - 3rd IWONN Conference
Period	6/12/06 → 9/12/06

Keywords

@inproceedings{3be66cf370604426b6571783f8a311bc,

title = "Advanced silicon micromachiningfor 3D micro and nanostructuring",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "PM Sarro and J Wei",

year = "2006",

language = "Undefined/Unknown",

isbn = "987-90-90214597",

publisher = "Academic Press",

pages = "349--352",

editor = "s.n.",

booktitle = "Proceedings of thr 1st IWOFM - 3rd IWONN Conference",

address = "United States",

note = "the 1st IWOFM - 3rd IWONN Conference ; Conference date: 06-12-2006 Through 09-12-2006",

}

TY - GEN

T1 - Advanced silicon micromachiningfor 3D micro and nanostructuring

AU - Sarro, PM

AU - Wei, J

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 987-90-90214597

SP - 349

EP - 352

BT - Proceedings of thr 1st IWOFM - 3rd IWONN Conference

A2 - s.n., null

PB - Academic Press

CY - Halong, Vietnam

T2 - the 1st IWOFM - 3rd IWONN Conference

Y2 - 6 December 2006 through 9 December 2006

ER -