Advanded dry etching for next generation thin film heads for mangentic recording.

MSP Andriesse, EWJM van der Drift

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology
Number of pages6
Publication statusPublished - 2001

Publication series

Name
PublisherTU Delft

Bibliographical note

Confidential

Keywords

  • ZX Int.klas.verslagjaar < 2002

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