Advanded dry etching for next generation thin film heads for mangentic recording.

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Delft University of Technology
Number of pages	9
Publication status	Published - 2001

Name
Publisher	TU Delft

Confidential

Keywords

@book{25d0b5b3f06e4aa481d801762b3217ea,

title = "Advanded dry etching for next generation thin film heads for mangentic recording.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "MSP Andriesse and \{van der Drift\}, EWJM",

note = "Confidential",

year = "2001",

language = "Undefined/Unknown",

publisher = "Delft University of Technology",

}