Agglomeration of amorphous silicon film with high energy density excimer laser irradiation

M He, R Ishihara, JW Metselaar, CIM Beenakker

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2872-2878
Number of pages7
JournalThin Solid Films
Volume515
Publication statusPublished - 2007

Bibliographical note

NEO

Keywords

  • Elektrotechniek
  • Techniek
  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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