Original language | English |
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Qualification | Doctor of Philosophy |
Awarding Institution |
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Supervisors/Advisors |
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Thesis sponsors | |
Award date | 20 Jun 2016 |
Print ISBNs | 978-94-028-0232-0 |
DOIs | |
Publication status | Published - 20 Jun 2016 |
Keywords
- Optical filter
- CMOS-compatible
- silicon-based
- Residual stress
- air-gap optical filter