Airgap-based MEMS optical filters: For the ultraviolet-visible spectrum

Amir Ghaderi

Research output: ThesisDissertation (TU Delft)

7 Citations (Scopus)
66 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Theuwissen, A.J.P.A.M., Supervisor
  • Wolffenbuttel, R.F., Supervisor
Thesis sponsors
Award date20 Jun 2016
Print ISBNs978-94-028-0232-0
Publication statusPublished - 20 Jun 2016


  • Optical filter
  • CMOS-compatible
  • silicon-based
  • Residual stress
  • air-gap optical filter

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