Engineering
Thin Films
100%
Solid Solution
100%
Microstructure
100%
Growth Temperature
100%
Mechanisms
100%
Magnetron
100%
Free Electron
100%
Secondary Phase
100%
Density
100%
Alloying
100%
Temperature
100%
Charge Transport
100%
INIS
charge transport
100%
investigations
100%
zinc oxides
100%
magnetrons
33%
electron density
33%
sputtering
33%
electron mobility
33%
microstructure
33%
range
33%
films
33%
segregation
33%
growth
33%
solid solutions
33%
electrical properties
33%
thin films
33%
concentration
33%
doped materials
33%
deactivation
33%
Material Science
Alloying
100%
ZnO
100%
Temperature
66%
Microstructure
33%
Carrier Concentration
33%
Film
33%
Solid Solution
33%
Electron Mobility
33%
Magnetron Sputtering
33%
Thin Films
33%
Electrical Property
33%
Keyphrases
Electrical Activation
100%
Pulsed Reactive Magnetron Sputtering
50%
Al Activation
50%
Al Concentration
50%
Al-doped ZnO
50%
Free Electron Density
50%
Observed Effects
50%
Metastable Solid Solution
50%
ZnO Thin Films
50%
Chemical Engineering
Growth Temperature
100%
Magnetron Sputtering
100%
Temperature
100%