Al mediated solid phase epitaxy of silicon on insulator

A Sakic, Y Civale, LK Nanver, C Biasotto, V Jovanovic

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationAmorphous and polycrystalline thin film silicon science and technology-2010
EditorsQ Wang, B Yan, S Higashi, CC Tsai, A Flewitt
Place of PublicationWarrendale, PA, USA
PublisherMaterials Research Society
Pages427-432
Number of pages6
DOIs
Publication statusPublished - 2010
EventMRS Spring Meeting 2010, San Francisco, CA, USA - Warrendale, PA, USA
Duration: 5 Apr 20109 Apr 2010

Publication series

Name
PublisherMaterials Research Society
NameMaterials Research Society Symposium Proceedings
Volume1245
ISSN (Print)0272-9172

Conference

ConferenceMRS Spring Meeting 2010, San Francisco, CA, USA
Period5/04/109/04/10

Keywords

  • Conf.proc. > 3 pag

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