Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates

B Morana, G Fiorentino, G Pandraud, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings of the IEEE international conference on micro electro mechanical systems
EditorsGBV Lee, T Tsuchiya
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages484-487
Number of pages4
ISBN (Print)978-146735655-8
DOIs
Publication statusPublished - 2013
EventIEEE MEMS 2013, Taipei, Taiwan - Piscataway, NJ, USA
Duration: 20 Jan 201324 Jan 2013

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE MEMS 2013, Taipei, Taiwan
Period20/01/1324/01/13

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