@inproceedings{d085da6087e74613aa27abbe8b3572ea,
title = "Alignment and Overlay Characterization for 3D Integration and Advanced Packaging",
keywords = "Conf.proc. > 3 pag",
author = "{van Zeijl}, HW and PM Sarro",
year = "2009",
language = "Undefined/Unknown",
isbn = "978-1-4244-5100-5",
publisher = "IEEE Society",
pages = "1--5",
editor = "s.n.",
booktitle = "Proc. of 11th Electronic packaging and Technology conference 2009 (EPTC 2009)",
note = "11th Electronic packaging and Technology conference 2009 ; Conference date: 09-12-2009 Through 11-12-2009",
}