Alignment control of STEM a ronchigram based approach

SW van der Hoeven, AJ den Dekker, A Tejada Ruiz

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)118-119
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numberS2
Publication statusPublished - 2009

Keywords

  • CWTS JFIS < 0.75

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