Original language | Undefined/Unknown |
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Title of host publication | The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, TECHNICAL DIGEST |
Editors | K Najafi, M Schmidt |
Publisher | IEEE Society |
Pages | 1071-1074 |
Number of pages | 4 |
Publication status | Published - 2009 |
Publication series
Name | |
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Publisher | IEEE |
Keywords
- Conf.proc. > 3 pag