Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls

C Shen, HTM Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, TECHNICAL DIGEST
Editors	K Najafi, M Schmidt
Publisher	IEEE
Pages	1071-1074
Number of pages	4
Publication status	Published - 2009

Name
Publisher	IEEE

Keywords

@inproceedings{1f25736674a247cc90c3e62a370a30e7,

title = "Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls",

keywords = "Conf.proc. > 3 pag",

author = "C Shen and HTM Pham and PM Sarro",

year = "2009",

language = "Undefined/Unknown",

publisher = "IEEE",

pages = "1071--1074",

editor = "K Najafi and M Schmidt",

booktitle = "The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, TECHNICAL DIGEST",

address = "United States",

}

Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls. / Shen, C; Pham, HTM; Sarro, PM.
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, TECHNICAL DIGEST. ed. / K Najafi; M Schmidt. IEEE, 2009. p. 1071-1074.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls

AU - Shen, C

AU - Pham, HTM

AU - Sarro, PM

PY - 2009

Y1 - 2009

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1071

EP - 1074

BT - The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, TECHNICAL DIGEST

A2 - Najafi, K

A2 - Schmidt, M

PB - IEEE

ER -