AlN piezoelectric films for sensing and actuation

AT Tran

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Sarro, P.M., Supervisor
Award date16 Apr 2014
Place of PublicationDelft, The Netherlands
Print ISBNs978 94 6203 566 9
DOIs
Publication statusPublished - 2014

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