Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions

Q Ren, LK Nanver, CCG Visser, JW Slotboom

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	3rd international conference on matyerials for microelectronics: proceedings
Place of Publication	London
Publisher	IOM communications
Pages	97-101
Number of pages	5
ISBN (Print)	1-86125-129-7
Publication status	Published - 2000
Event	International conference on matyerials for microelectronics, Dublin - London Duration: 16 Oct 2000 → 17 Oct 2000

Name
Publisher	IOM Communications

Conference	International conference on matyerials for microelectronics, Dublin
Period	16/10/00 → 17/10/00

Keywords

@inproceedings{ddf6af8ba98f4fb2893cefcf4df3033a,

title = "Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "Q Ren and LK Nanver and CCG Visser and JW Slotboom",

year = "2000",

language = "Undefined/Unknown",

isbn = "1-86125-129-7",

publisher = "IOM communications",

pages = "97--101",

booktitle = "3rd international conference on matyerials for microelectronics: proceedings",

address = "United Kingdom",

note = "International conference on matyerials for microelectronics, Dublin ; Conference date: 16-10-2000 Through 17-10-2000",

}

TY - GEN

T1 - Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions

AU - Ren, Q

AU - Nanver, LK

AU - Visser, CCG

AU - Slotboom, JW

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 1-86125-129-7

SP - 97

EP - 101

BT - 3rd international conference on matyerials for microelectronics: proceedings

PB - IOM communications

CY - London

T2 - International conference on matyerials for microelectronics, Dublin

Y2 - 16 October 2000 through 17 October 2000

ER -