Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions

A Sakic, L Qi, TLM Scholtes, J van der Cingel, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)65-73
Number of pages9
JournalSolid-State Electronics
Issue numberJune 2013
Publication statusPublished - 2013

Bibliographical note

Selected Papers from the ESSDERC 2012 Conference
Online available 12-3-2013

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