Aluminum thermal motor for high bandwidth positioning stages

SL Paalvast, HTM Pham, PM Sarro, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publication9th international conference of the european society for precision engineering and nanotechnology: san sebastian, spain
EditorsBrinkmeijer E. Spaan H. Brussel H van
Place of Publications.l.
PublisherEUSPEN
Pages54-58
Number of pages5
ISBN (Print)978-0-9553082-6-0
Publication statusPublished - 2009
Event9th international conference of the european society for precision engineering and nanotechnology - Bedord, UK, San Sebastian, Spain
Duration: 2 Jun 20095 Jun 2009

Publication series

Name
PublisherEuspen

Conference

Conference9th international conference of the european society for precision engineering and nanotechnology
Country/TerritorySpain
CitySan Sebastian
Period2/06/095/06/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this