An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors

Y Huang; G Pandraud; PM Sarro

doi:10.1016/j.proeng.2010.09.314

An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors

Y Huang, G Pandraud, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Proceedings Eurosensor XXIV Conference
Editors	B Jakoby, MJ Vellekoop
Place of Publication	Amsterdam
Publisher	Elsevier
Pages	1148-1151
Number of pages	4
DOIs	https://doi.org/10.1016/j.proeng.2010.09.314
Publication status	Published - 2010
Event	Eurosensor XXIV Conference, Linz, Austria - Amsterdam Duration: 5 Sept 2010 → 8 Sept 2010

Publication series

Name
Publisher	Elsevier

Name	Procedia Engineering
Volume	5
ISSN (Print)	1877-7058

Conference

Conference	Eurosensor XXIV Conference, Linz, Austria
Period	5/09/10 → 8/09/10

Keywords

Peer-lijst tijdschrift

Access to Document

10.1016/j.proeng.2010.09.314

Cite this

@inproceedings{65571383f24c4e6bbd07623dd063661b,

title = "An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors",

keywords = "Peer-lijst tijdschrift",

author = "Y Huang and G Pandraud and PM Sarro",

year = "2010",

doi = "10.1016/j.proeng.2010.09.314",

language = "English",

publisher = "Elsevier",

pages = "1148--1151",

editor = "B Jakoby and MJ Vellekoop",

booktitle = "Proceedings Eurosensor XXIV Conference",

note = "Eurosensor XXIV Conference, Linz, Austria ; Conference date: 05-09-2010 Through 08-09-2010",

}

Huang, Y, Pandraud, G & Sarro, PM 2010, An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors. in B Jakoby & MJ Vellekoop (eds), Proceedings Eurosensor XXIV Conference. Procedia Engineering, vol. 5, Elsevier, Amsterdam, pp. 1148-1151, Eurosensor XXIV Conference, Linz, Austria, 5/09/10. https://doi.org/10.1016/j.proeng.2010.09.314

An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors. / Huang, Y; Pandraud, G; Sarro, PM.
Proceedings Eurosensor XXIV Conference. ed. / B Jakoby; MJ Vellekoop. Amsterdam: Elsevier, 2010. p. 1148-1151 (Procedia Engineering; Vol. 5).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - An ALD etch-back method to fabricate high aspect ratio nanopillar arrays for photonic crystal sensors

AU - Huang, Y

AU - Pandraud, G

AU - Sarro, PM

PY - 2010

Y1 - 2010

KW - Peer-lijst tijdschrift

U2 - 10.1016/j.proeng.2010.09.314

DO - 10.1016/j.proeng.2010.09.314

M3 - Conference contribution

SP - 1148

EP - 1151

BT - Proceedings Eurosensor XXIV Conference

A2 - Jakoby, B

A2 - Vellekoop, MJ

PB - Elsevier

CY - Amsterdam

T2 - Eurosensor XXIV Conference, Linz, Austria

Y2 - 5 September 2010 through 8 September 2010

ER -