An analytical kinetic model for chemical-vapor deposition of pureB layers from diborane

V Mohammadi, WB De Boer, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-10
Number of pages10
JournalJournal of Applied Physics
Issue number11
Publication statusPublished - 2012

Bibliographical note

Published online: 3 december 2012

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