An analytical model and verification for MEMS Pirani gauges

F Santagata, E Iervolino, L Mele, AW van Herwaarden, JF Creemer, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-7
Number of pages	7
Journal	Journal of Micromechanics and Microengineering
Volume	21
Issue number	11
Publication status	Published - 2011

Keywords

@article{e539e9adaec8495c82bd3174c4e5beda,

title = "An analytical model and verification for MEMS Pirani gauges",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "F Santagata and E Iervolino and L Mele and {van Herwaarden}, AW and JF Creemer and PM Sarro",

year = "2011",

language = "English",

volume = "21",

pages = "1--7",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "11",

}

TY - JOUR

T1 - An analytical model and verification for MEMS Pirani gauges

AU - Santagata, F

AU - Iervolino, E

AU - Mele, L

AU - van Herwaarden, AW

AU - Creemer, JF

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 21

SP - 1

EP - 7

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 11

ER -