An analytical model and verification for MEMS Pirani gauges

F Santagata, E Iervolino, L Mele, AW van Herwaarden, JF Creemer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number11
Publication statusPublished - 2011

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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