An electro-thermal silicon-polymer micro-gripper for simultaneous in-plane and out-of-plane motions

J Wei, T Chu Duc, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the conference EUROSENSORS XXII
EditorsG Gerlach
Place of PublicationDresden, Germany
PublisherVerein Deutscher Ingenieure e.V.
Pages1466-1469
Number of pages4
ISBN (Print)978-3-00-025217-4
Publication statusPublished - 2008
EventEurosensors XXII: The 22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems - Dresden, Germany
Duration: 7 Sept 200810 Sept 2008
Conference number: 22

Conference

ConferenceEurosensors XXII
Country/TerritoryGermany
CityDresden
Period7/09/0810/09/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this