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An empirical noise model for the benefit of model-based hydrodynamic leveling
Y. Afrasteh*, D. C. Slobbe, M. Verlaan, R. Klees, H. Guarneri, L. Keyzer, J. Pietrzak, M. Sacher, M. Snellen, F. Zijl
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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