An experimental setup to proof the MAPPER electron lithography concept.

BJ Kampherbeek, MJJ Wieland, P Kruit

    Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

    Original languageUndefined/Unknown
    Title of host publicationAbstractbook EIPBN'99.
    Pages239-240
    Number of pages2
    Publication statusPublished - 1999

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