| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Abstractbook Micro-and-Nano-Engineering 99. |
| Pages | 19-20 |
| Number of pages | 2 |
| Publication status | Published - 1999 |
An experimental setup to prove the MAPPER electron lithography concept.
BJ Kampherbeek, MJJ Wieland, P Kruit
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific