Original language | Undefined/Unknown |
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Title of host publication | Proceedings International Conference on Micro- & Nano-Engineering 1999. |
Editors | M Gentili |
Pages | 19-20 |
Number of pages | 2 |
Publication status | Published - 1999 |
An experimental setup to test the Mapper electron lithography concept.
BJ Kampherbeek, MJJ Wieland, A Zuuk, P Kruit
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review