An experimental setup to test the Mapper electron lithography concept.

BJ Kampherbeek, MJJ Wieland, A Zuuk, P Kruit

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings International Conference on Micro- & Nano-Engineering 1999.
EditorsM Gentili
Pages19-20
Number of pages2
Publication statusPublished - 1999

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