An experimental setup to test the MAPPER electron lithography concept.

BJ Kampherbeek, MJJ Wieland, A Zuuk, P Kruit

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)279-282
Number of pages4
JournalMicroelectronic Engineering
Volume53
Issue number1-4
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this