An experimental setup to test the MAPPER electron lithography concept.

BJ Kampherbeek, MJJ Wieland, A Zuuk, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	279-282
Number of pages	4
Journal	Microelectronic Engineering
Volume	53
Issue number	1-4
Publication status	Published - 2000

Keywords

@article{093162fae120462a9643255962e1d6bb,

title = "An experimental setup to test the MAPPER electron lithography concept.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "BJ Kampherbeek and MJJ Wieland and A Zuuk and P Kruit",

year = "2000",

language = "Undefined/Unknown",

volume = "53",

pages = "279--282",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "1-4",

}