Abstract
Emerging non-imaging ultrasound applications, such as ultrasonic wireless power delivery to implantable devices and ultrasound neuromodulation, require wearable form factors, millisecond-range pulse durations and focal spot diameters approaching 100 μm with electronic control of its three-dimensional location. None of these are compatible with typical handheld linear array ultrasound imaging probes. In this work, we present a 4 mm × 5 mm 2D ultrasound phased array transmitter with integrated piezoelectric ultrasound transducers on complementary metal-oxide-semiconductor (CMOS) integrated circuits, featuring pixel-level pitch-matched transmit beamforming circuits which support arbitrary pulse duration. Our direct integration method enabled up to 10 MHz ultrasound arrays in a patch form-factor, leading to focal spot diameter of ∼200 μm, while pixel pitch-matched beamforming allowed for precise three-dimensional positioning of the ultrasound focal spot. Our device has the potential to provide a high-spatial resolution and wearable interface to both powering of highly-miniaturized implantable devices and ultrasound neuromodulation.
Original language | English |
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Pages (from-to) | 731-742 |
Number of pages | 12 |
Journal | IEEE Transactions on Biomedical Circuits and Systems |
Volume | 15 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2021 |
Keywords
- 2D ultrasound phased-array
- Implants
- Integrated circuits
- Neuromodulation
- Phased arrays
- phased-array beamforming
- piezoelectric ultrasound transducers
- PZT integration
- Transducers
- Transmitters
- Ultrasonic imaging
- ultrasound neuromodulation
- ultrasound powered implantable devices