An interferometer to measure the form figure of aspherical mirrors as used in {EUV} lithography.

RG Klaver, H van Brug, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Laser Metrology and Inspection.
Editors	Hans J Tiziani, Pramod K Rastogi
Publisher	SPIE
Pages	123-132
Number of pages	10
ISBN (Print)	0-8194-3309-8
Publication status	Published - 1999

Name
Publisher	Europto/SPIE

Name
Volume	3823

Cite this

@inproceedings{04a29d6ffe774b06b0ef56179e3f5ef7,

title = "An interferometer to measure the form figure of aspherical mirrors as used in {EUV} lithography.",

author = "RG Klaver and {van Brug}, H and JJM Braat",

year = "1999",

language = "Undefined/Unknown",

isbn = "0-8194-3309-8",

publisher = "SPIE",

pages = "123--132",

editor = "Tiziani, {Hans J} and Rastogi, {Pramod K}",

booktitle = "Laser Metrology and Inspection.",

address = "United States",

}