An investigation into mechanical strenght of silicon wafers with bulk-micromachined structures

A Polykov, M Bartek, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE ProRISC SeSens 2001: proceedings
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	163-166
Number of pages	4
ISBN (Print)	90-73461-29-4
Publication status	Published - 2001
Event	Semiconductor Advances for Future Electronics Conference SAFE 2001, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Name
Publisher	STW technology foundation

Conference	Semiconductor Advances for Future Electronics Conference SAFE 2001, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

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title = "An investigation into mechanical strenght of silicon wafers with bulk-micromachined structures",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "A Polykov and M Bartek and JN Burghartz",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-29-4",

publisher = "STW Technology Foundation",

pages = "163--166",

booktitle = "SAFE ProRISC SeSens 2001: proceedings",

note = "Semiconductor Advances for Future Electronics Conference SAFE 2001, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",

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TY - GEN

T1 - An investigation into mechanical strenght of silicon wafers with bulk-micromachined structures

AU - Polykov, A

AU - Bartek, M

AU - Burghartz, JN

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-29-4

SP - 163

EP - 166

BT - SAFE ProRISC SeSens 2001: proceedings

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor Advances for Future Electronics Conference SAFE 2001, Veldhoven

Y2 - 28 November 2001 through 30 November 2001

ER -