An investigation of amorphous hydrogenated carbon (a-C:H) coatings using x-ray reflectivity and scratch testing

F Rabbani, RF Staakman, ARHF Ettema

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)2107-2111
    Number of pages5
    JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
    Issue number5
    Publication statusPublished - 2004


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