An optical in-plane displacement measurement technique with sub-nanometer accuracy based on curve-fitting

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

6 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings 2014 27th IEEE International Conference on Micro Electro Mechanical Systems
EditorsF Ayazi, CJ Kim
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages580-583
Number of pages4
ISBN (Print)978-1-4799-3508-6
DOIs
Publication statusPublished - 2014
Event27th MEMS 2014, San Francisco, USA - Piscataway, NJ, USA
Duration: 26 Jan 201430 Jan 2014

Publication series

Name
PublisherIEEE

Conference

Conference27th MEMS 2014, San Francisco, USA
Period26/01/1430/01/14

Keywords

  • Conf.proc. > 3 pag

Cite this

Kokorian, J., Buja, F., Staufer, U., & van Spengen, WM. (2014). An optical in-plane displacement measurement technique with sub-nanometer accuracy based on curve-fitting. In F. Ayazi, & CJ. Kim (Eds.), Proceedings 2014 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 580-583). IEEE Society. https://doi.org/10.1109/MEMSYS.2014.6765707