An SOI thermal-diffusivity-based temperature sensor with ±0.6°C (3-sigma) untrimmed inaccuracy from -70°C to 170°C

CPL van Vroonhoven, KAA Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS)
EditorsS Xia, M Bao, L-S Fan
Place of PublicationBeijing, China
PublisherIEEE Society
Pages2887-2890
Number of pages4
ISBN (Print)978-1-4577-0157-3
DOIs
Publication statusPublished - 2011
EventTransducers 2011 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceTransducers 2011
Period5/06/119/06/11

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