An SOI thermal-diffusivity-based temperature sensor with ±0.6°C (3-sigma) untrimmed inaccuracy from -70°C to 170°C

CPL van Vroonhoven, KAA Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS)
EditorsS Xia, M Bao, L-S Fan
Place of PublicationBeijing, China
PublisherIEEE Society
Pages2887-2890
Number of pages4
ISBN (Print)978-1-4577-0157-3
DOIs
Publication statusPublished - 2011
EventTransducers 2011 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceTransducers 2011
Period5/06/119/06/11

Cite this

van Vroonhoven, CPL., & Makinwa, KAA. (2011). An SOI thermal-diffusivity-based temperature sensor with ±0.6°C (3-sigma) untrimmed inaccuracy from -70°C to 170°C. In S. Xia, M. Bao, & L-S. Fan (Eds.), 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS) (pp. 2887-2890). IEEE Society. https://doi.org/10.1109/TRANSDUCERS.2011.5969119