Analysis and analitycal modeling of static pull-in with application to MEMS-based voltage reference and process monitoring

LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

50 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)342-354
Number of pages13
JournalIEEE Journal of Microelectromechanical Systems
Volume13
Issue number2
Publication statusPublished - 2004

Keywords

  • ZX CWTS JFIS >= 3.00

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