Analysis of III-V laye stacks on INP substrates using spectroscopic ellipsometry in the NIR spectral range

HG Bukkems, YS Oei, U Richter, B Gruska

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)165-170
    Number of pages6
    JournalThin Solid Films
    Volume364
    Issue number1
    Publication statusPublished - 2000

    Keywords

    • ZX Int.klas.verslagjaar < 2002

    Cite this