Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

G van Elzakker, V Nadazdy, FD Tichelaar, JW Metselaar, M Zeman

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

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@article{89c692d342e74567ac851585ea8a494f,

title = "Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane",

keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Elzakker}, G and V Nadazdy and FD Tichelaar and JW Metselaar and M Zeman",

year = "2006",

language = "Undefined/Unknown",

volume = "511-512",

pages = "252--257",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

AU - van Elzakker, G

AU - Nadazdy, V

AU - Tichelaar, FD

AU - Metselaar, JW

AU - Zeman, M

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0040-6090

VL - 511-512

SP - 252

EP - 257

JO - Thin Solid Films

JF - Thin Solid Films

ER -