Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

G van Elzakker, V Nadazdy, FD Tichelaar, JW Metselaar, M Zeman

Research output: Contribution to journalArticleScientificpeer-review

35 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)252-257
Number of pages6
JournalThin Solid Films
Volume511-512
Publication statusPublished - 2006

Keywords

  • Elektrotechniek
  • Techniek
  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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