Keyphrases
Far-field Measurement
100%
Analytical Calculation
100%
Sidewall Angle
100%
Direct Retrieval
33%
Numerical Simulation
33%
Direct Measurement
33%
Specific Structure
33%
Semiconductor Industry
33%
Detection System
33%
Scattering Effect
33%
Analytical Model
33%
Cliff
33%
Grating
33%
Physics
Calculation
100%
Far Field
100%
Side
100%
Independent Variables
66%
Model
33%
Dimension
33%
Shapes
33%
Detection System
33%
Semiconductors
33%
Performance
33%
Engineering
Field Measurement
100%
Side Wall
100%
Measurement
33%
Critical Dimension
33%
Scattering Effect
33%
Retrieval
33%
Computer Simulation
33%
Performance
33%
Detection System
33%
Analytical Model
33%
Scattering
33%
Semiconductor
33%
INIS
walls
100%
scattering
66%
gratings
33%
dimensions
33%
semiconductor materials
33%
shape
33%
height
33%
illumination
33%
performance
33%
detection
33%
tools
33%
industry
33%
computerized simulation
33%
Material Science
Semiconductor Material
100%
Detection System
100%