Analytical model for pull-in time low-Q MEMS devices

LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationNanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CDROM
Place of PublicationCamebridge, MA. USA
PublisherNanoscience and Technology Intitute
Pages271-274
Number of pages4
ISBN (Print)0-9728422-6-8
Publication statusPublished - 2004
Event2004 NSTI nanotechnology conferemce and trde show, Boston, MA. USA - Camebridge, MA. USA
Duration: 7 Mar 200411 Mar 2004

Publication series

Name
PublisherNanoscience and Technology Intitute

Conference

Conference2004 NSTI nanotechnology conferemce and trde show, Boston, MA. USA
Period7/03/0411/03/04

Keywords

  • Conf.proc. > 3 pag

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