Analytical model for pull-in time low-Q MEMS devices

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CDROM
Place of Publication	Camebridge, MA. USA
Publisher	Nanoscience and Technology Intitute
Pages	271-274
Number of pages	4
ISBN (Print)	0-9728422-6-8
Publication status	Published - 2004
Event	2004 NSTI nanotechnology conferemce and trde show, Boston, MA. USA - Camebridge, MA. USA Duration: 7 Mar 2004 → 11 Mar 2004

Name
Publisher	Nanoscience and Technology Intitute

Conference	2004 NSTI nanotechnology conferemce and trde show, Boston, MA. USA
Period	7/03/04 → 11/03/04

ed. is niet bekend

Keywords

@inproceedings{14e53695b20c4e95a6cf41a9f8c5cf7e,

title = "Analytical model for pull-in time low-Q MEMS devices",

keywords = "Conf.proc. > 3 pag",

author = "LA Rocha and E Cretu and RF Wolffenbuttel",

note = "ed. is niet bekend; 2004 NSTI nanotechnology conferemce and trde show, Boston, MA. USA ; Conference date: 07-03-2004 Through 11-03-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "0-9728422-6-8",

publisher = "Nanoscience and Technology Intitute",

pages = "271--274",

booktitle = "Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CDROM",

}

Analytical model for pull-in time low-Q MEMS devices. / Rocha, LA; Cretu, E; Wolffenbuttel, RF.
Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CDROM. Camebridge, MA. USA: Nanoscience and Technology Intitute, 2004. p. 271-274.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Analytical model for pull-in time low-Q MEMS devices

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-9728422-6-8

SP - 271

EP - 274

BT - Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CDROM

PB - Nanoscience and Technology Intitute

CY - Camebridge, MA. USA

T2 - 2004 NSTI nanotechnology conferemce and trde show, Boston, MA. USA

Y2 - 7 March 2004 through 11 March 2004

ER -