Textured interfaces in thin-film silicon solar cells improve the efficiency by light scattering. A technique to get experimental access to the angular intensity distribution (AID) at textured interfaces of the transparent conductive oxide (TCO) and silicon is introduced. Measurements are performed on a sample with polished microcrystalline silicon layer deposited onto a rough TCO layer. The AID determined from the experiment is used to validate the AID obtained by a rigorous solution of Maxwell¿s equations. Furthermore, the applicability of other theoretical approaches based on scalar scattering theory and ray tracing is discussed with respect to the solution of Maxwell¿s equations.
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