Anisotropic film growth during sputterdeposition of chromium

SY Grachev, J-D Kamminga, PFA Alkemade, GCAM Janssen

    Research output: Book/Report › Report › Scientific

    Original languageUndefined/Unknown
    Place of PublicationUtrecht
    PublisherFOM-Utrecht
    Number of pages1
    Publication statusPublished - 2003

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    PublisherFOM-Utrecht

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