Anisotropy of the piezojunction effect in silicon transistors

JF Creemer, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationTechnical digest: MEMS 2002 IEEE international conference Las Vegas
Place of PublicationPiscataway
PublisherIEEE Society
Pages316-319
Number of pages4
ISBN (Print)0-7803-7185-2
Publication statusPublished - 2002
EventFifteenth IEEE international conference on micro electro mechnical systems, Las Vegas - Piscataway
Duration: 20 Jan 200224 Jan 2002

Publication series

Name
PublisherIEEE

Conference

ConferenceFifteenth IEEE international conference on micro electro mechnical systems, Las Vegas
Period20/01/0224/01/02

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag
  • ZX Int.klas.verslagjaar < 2002

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