Annealing experiments on supercritical Si1-xGex layers grown by RPCVD

K Grimm, L Vescan, CCG Visser, LK Nanver, H Lüth

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	261-265
Number of pages	5
Journal	Materials Science and Engineering A: Structural Materials: Properties, Microstructures and Processing
Issue number	B69-70
Publication status	Published - 2000

Keywords

@article{52857958a17942aa924c873fce7d2311,

title = "Annealing experiments on supercritical Si1-xGex layers grown by RPCVD",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "K Grimm and L Vescan and CCG Visser and LK Nanver and H L{\"u}th",

year = "2000",

language = "Undefined/Unknown",

pages = "261--265",

journal = "Materials Science and Engineering A: Structural Materials: Properties, Microstructures and Processing",

issn = "0921-5093",

publisher = "Elsevier",

number = "B69-70",

}

TY - JOUR

T1 - Annealing experiments on supercritical Si1-xGex layers grown by RPCVD

AU - Grimm, K

AU - Vescan, L

AU - Visser, CCG

AU - Nanver, LK

AU - Lüth, H

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0921-5093

SP - 261

EP - 265

JO - Materials Science and Engineering A: Structural Materials: Properties, Microstructures and Processing

JF - Materials Science and Engineering A: Structural Materials: Properties, Microstructures and Processing

IS - B69-70

ER -