@inproceedings{fdecc32360c14a198a68b8c35db7a105,
title = "Anodic aluminum oxide templates for nanocapacitors array fabrication",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "SH Le and TMH Pham and PM Sarro",
note = "Editor onbekend JH/STW; STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands ; Conference date: 17-11-2005 Through 18-11-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "90-73461-50-2",
publisher = "Dutch Technology Foundation",
pages = "96--100",
editor = "s.n.",
booktitle = "STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)",
}