Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Pieter Kruit (Inventor), Ron Naftali (Inventor)

Research output: Patent

Patent: OCT-16-086
Applicant: TU Delft

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
Kruit, P. & Naftali, R., 2019, IPC No. H01J, Patent No. US 10,395,887, Priority date 20 Feb 2018
Research output: Patent

Research output