Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Pieter Kruit (Inventor), Ron Naftali (Inventor)

    Research output: Patent

    Original languageEnglish
    IPCH01J
    Priority date20/02/18
    Publication statusPublished - 2019

    Research Output

    Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

    Kruit, P. & Naftali, R., 2019, IPC No. H01J, Patent No. US 10,395,887, Priority date 20 Feb 2018

    Research output: Patent

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