Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Pieter Kruit (Inventor), Ron Naftali (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberUS 10,395,887
    IPCH01J
    Priority date20/02/18
    Publication statusPublished - 2019

    Bibliographical note

    Patent: OCT-16-086
    Applicant: TU Delft

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