Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Pieter Kruit (Inventor), Ron Naftali (Inventor)

Research output: Patent

Original languageEnglish
Patent numberUS 10,395,887
IPCH01J
Priority date20/02/18
Publication statusPublished - 2019

Research Output

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Priority date 20 Feb 2018, Priority No. WO 2019/164392

Research output: Patent

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