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Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
Pieter Kruit
(Inventor), Ron Naftali (Inventor)
Research output
:
Patent
Overview
Research output
(1)
Research output
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2019
2019
2019
1
Patent
Research output per year
Research output per year
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2019
Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
Kruit, P.
&
Naftali, R.
,
2019
, IPC No. H01J, Patent No. US 10,395,887, Priority date
20 Feb 2018
Research output
:
Patent